1/31/2011	9:45:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	9:45:56 AM	Recipe started at 9:45 AM
1/31/2011	9:45:56 AM	Helium valve closed
1/31/2011	9:45:56 AM	H2 valve closed
1/31/2011	9:45:56 AM	BCl3 valve closed
1/31/2011	9:45:56 AM	PH3 valve closed
1/31/2011	9:45:56 AM	SiCl4 pre valve closed
1/31/2011	9:45:56 AM	SiCl4 post valve closed
1/31/2011	9:45:56 AM	Main Vac valve closed
1/31/2011	9:45:56 AM	Bubbler valve closed
1/31/2011	9:45:56 AM	Bypass valve opened
1/31/2011	9:45:56 AM	Helium MFC set to  0.000000
1/31/2011	9:45:56 AM	H2 MFC set to  0.000000
1/31/2011	9:45:56 AM	BCl3 MFC set to  0.000000
1/31/2011	9:45:56 AM	PHl3 MFC set to  0.000000
1/31/2011	9:45:56 AM	SiCl4 MFC set to  0.000000
1/31/2011	9:45:56 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	9:45:56 AM	Tube furnace set to 0
1/31/2011	9:46:35 AM	Helium valve closed
1/31/2011	9:46:35 AM	H2 valve closed
1/31/2011	9:46:35 AM	BCl3 valve closed
1/31/2011	9:46:35 AM	PH3 valve closed
1/31/2011	9:46:35 AM	SiCl4 pre valve closed
1/31/2011	9:46:35 AM	SiCl4 post valve closed
1/31/2011	9:46:35 AM	Bubbler valve closed
1/31/2011	9:46:35 AM	Main Vac valve opened
1/31/2011	9:46:35 AM	Bypass valve opened
1/31/2011	9:46:35 AM	Helium MFC set to  0.000000
1/31/2011	9:46:35 AM	H2 MFC set to  0.000000
1/31/2011	9:46:35 AM	BCl3 MFC set to  0.000000
1/31/2011	9:46:35 AM	PHl3 MFC set to  0.000000
1/31/2011	9:46:35 AM	SiCl4 MFC set to  0.000000
1/31/2011	9:46:35 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	9:46:35 AM	Tube furnace set to 0
1/31/2011	9:46:35 AM	Run finished at 9:46 AM
1/31/2011	9:46:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	11:14:43 AM	Helium MFC set to  100.000000
1/31/2011	11:14:45 AM	Helium valve opened
1/31/2011	11:21:26 AM	Helium MFC set to  0.000000
1/31/2011	11:21:27 AM	Helium valve closed
1/31/2011	11:24:07 AM	Main Vac valve closed
1/31/2011	11:24:09 AM	Bypass valve closed
1/31/2011	11:24:16 AM	Bypass valve opened
1/31/2011	11:24:17 AM	Main Vac valve opened
1/31/2011	11:28:04 AM	Recipe started at 11:28 AM
1/31/2011	11:28:04 AM	Helium valve closed
1/31/2011	11:28:04 AM	BCl3 valve closed
1/31/2011	11:28:04 AM	PH3 valve closed
1/31/2011	11:28:04 AM	SiCl4 pre valve closed
1/31/2011	11:28:04 AM	SiCl4 post valve closed
1/31/2011	11:28:04 AM	Main Vac valve closed
1/31/2011	11:28:04 AM	Bypass valve closed
1/31/2011	11:28:04 AM	Bubbler valve closed
1/31/2011	11:28:04 AM	H2 valve opened
1/31/2011	11:28:04 AM	Helium MFC set to  0.000000
1/31/2011	11:28:04 AM	H2 MFC set to  500.000000
1/31/2011	11:28:04 AM	BCl3 MFC set to  0.000000
1/31/2011	11:28:04 AM	PHl3 MFC set to  0.000000
1/31/2011	11:28:04 AM	SiCl4 MFC set to  0.000000
1/31/2011	11:28:04 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	11:28:04 AM	Tube furnace set to 200
1/31/2011	11:29:23 AM	Helium valve closed
1/31/2011	11:29:23 AM	BCl3 valve closed
1/31/2011	11:29:23 AM	PH3 valve closed
1/31/2011	11:29:23 AM	SiCl4 pre valve closed
1/31/2011	11:29:23 AM	SiCl4 post valve closed
1/31/2011	11:29:23 AM	Main Vac valve closed
1/31/2011	11:29:23 AM	Bypass valve closed
1/31/2011	11:29:23 AM	H2 valve opened
1/31/2011	11:29:23 AM	Bubbler valve opened
1/31/2011	11:29:23 AM	Helium MFC set to  0.000000
1/31/2011	11:29:23 AM	H2 MFC set to  400.000000
1/31/2011	11:29:23 AM	BCl3 MFC set to  0.000000
1/31/2011	11:29:23 AM	PHl3 MFC set to  0.000000
1/31/2011	11:29:23 AM	SiCl4 MFC set to  0.000000
1/31/2011	11:29:23 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	11:29:23 AM	Tube furnace set to 1001
1/31/2011	11:44:23 AM	Helium valve closed
1/31/2011	11:44:23 AM	BCl3 valve closed
1/31/2011	11:44:23 AM	PH3 valve closed
1/31/2011	11:44:23 AM	SiCl4 pre valve closed
1/31/2011	11:44:23 AM	SiCl4 post valve closed
1/31/2011	11:44:23 AM	Main Vac valve closed
1/31/2011	11:44:23 AM	Bypass valve closed
1/31/2011	11:44:23 AM	H2 valve opened
1/31/2011	11:44:23 AM	Bubbler valve opened
1/31/2011	11:44:23 AM	Helium MFC set to  0.000000
1/31/2011	11:44:23 AM	H2 MFC set to  400.000000
1/31/2011	11:44:23 AM	BCl3 MFC set to  0.000000
1/31/2011	11:44:23 AM	PHl3 MFC set to  0.000000
1/31/2011	11:44:23 AM	SiCl4 MFC set to  0.000000
1/31/2011	11:44:23 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	11:44:23 AM	Tube furnace set to 1000
1/31/2011	11:49:23 AM	Helium valve closed
1/31/2011	11:49:23 AM	PH3 valve closed
1/31/2011	11:49:23 AM	Main Vac valve closed
1/31/2011	11:49:23 AM	Bypass valve closed
1/31/2011	11:49:23 AM	H2 valve opened
1/31/2011	11:49:23 AM	BCl3 valve opened
1/31/2011	11:49:23 AM	SiCl4 pre valve opened
1/31/2011	11:49:23 AM	SiCl4 post valve opened
1/31/2011	11:49:23 AM	Bubbler valve opened
1/31/2011	11:49:23 AM	Helium MFC set to  0.000000
1/31/2011	11:49:23 AM	H2 MFC set to  500.000000
1/31/2011	11:49:23 AM	BCl3 MFC set to  4.000000
1/31/2011	11:49:23 AM	PHl3 MFC set to  0.000000
1/31/2011	11:49:23 AM	SiCl4 MFC set to  50.000000
1/31/2011	11:49:23 AM	Bypass solenoid MFC set to  0.000000
1/31/2011	11:49:23 AM	Tube furnace set to 1000
1/31/2011	12:09:23 PM	Helium valve closed
1/31/2011	12:09:23 PM	BCl3 valve closed
1/31/2011	12:09:23 PM	PH3 valve closed
1/31/2011	12:09:23 PM	SiCl4 pre valve closed
1/31/2011	12:09:23 PM	SiCl4 post valve closed
1/31/2011	12:09:23 PM	Main Vac valve closed
1/31/2011	12:09:23 PM	Bypass valve closed
1/31/2011	12:09:23 PM	H2 valve opened
1/31/2011	12:09:23 PM	Bubbler valve opened
1/31/2011	12:09:23 PM	Helium MFC set to  0.000000
1/31/2011	12:09:23 PM	H2 MFC set to  500.000000
1/31/2011	12:09:23 PM	BCl3 MFC set to  0.000000
1/31/2011	12:09:23 PM	PHl3 MFC set to  0.000000
1/31/2011	12:09:23 PM	SiCl4 MFC set to  0.000000
1/31/2011	12:09:23 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	12:09:24 PM	Tube furnace set to 0
1/31/2011	12:09:44 PM	H2 valve closed
1/31/2011	12:09:44 PM	BCl3 valve closed
1/31/2011	12:09:44 PM	PH3 valve closed
1/31/2011	12:09:44 PM	SiCl4 pre valve closed
1/31/2011	12:09:44 PM	SiCl4 post valve closed
1/31/2011	12:09:44 PM	Main Vac valve closed
1/31/2011	12:09:44 PM	Bypass valve closed
1/31/2011	12:09:44 PM	Helium valve opened
1/31/2011	12:09:44 PM	Bubbler valve opened
1/31/2011	12:09:44 PM	Helium MFC set to  400.000000
1/31/2011	12:09:44 PM	H2 MFC set to  0.000000
1/31/2011	12:09:44 PM	BCl3 MFC set to  0.000000
1/31/2011	12:09:44 PM	PHl3 MFC set to  0.000000
1/31/2011	12:09:44 PM	SiCl4 MFC set to  0.000000
1/31/2011	12:09:44 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	12:09:44 PM	Tube furnace set to 0
1/31/2011	12:29:44 PM	Helium valve closed
1/31/2011	12:29:44 PM	H2 valve closed
1/31/2011	12:29:44 PM	BCl3 valve closed
1/31/2011	12:29:44 PM	PH3 valve closed
1/31/2011	12:29:44 PM	SiCl4 pre valve closed
1/31/2011	12:29:44 PM	SiCl4 post valve closed
1/31/2011	12:29:44 PM	Main Vac valve closed
1/31/2011	12:29:44 PM	Bypass valve closed
1/31/2011	12:29:44 PM	Bubbler valve closed
1/31/2011	12:29:44 PM	Helium MFC set to  0.000000
1/31/2011	12:29:44 PM	H2 MFC set to  0.000000
1/31/2011	12:29:44 PM	BCl3 MFC set to  0.000000
1/31/2011	12:29:44 PM	PHl3 MFC set to  0.000000
1/31/2011	12:29:44 PM	SiCl4 MFC set to  0.000000
1/31/2011	12:29:44 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	12:29:44 PM	Tube furnace set to 0
1/31/2011	12:29:44 PM	Run finished at 12:29 PM
1/31/2011	12:31:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	12:31:46 PM	Recipe started at 12:31 PM
1/31/2011	12:31:46 PM	Helium valve closed
1/31/2011	12:31:46 PM	H2 valve closed
1/31/2011	12:31:46 PM	BCl3 valve closed
1/31/2011	12:31:46 PM	PH3 valve closed
1/31/2011	12:31:46 PM	SiCl4 pre valve closed
1/31/2011	12:31:46 PM	SiCl4 post valve closed
1/31/2011	12:31:46 PM	Main Vac valve closed
1/31/2011	12:31:46 PM	Bubbler valve closed
1/31/2011	12:31:46 PM	Bypass valve opened
1/31/2011	12:31:46 PM	Helium MFC set to  0.000000
1/31/2011	12:31:46 PM	H2 MFC set to  0.000000
1/31/2011	12:31:46 PM	BCl3 MFC set to  0.000000
1/31/2011	12:31:46 PM	PHl3 MFC set to  0.000000
1/31/2011	12:31:46 PM	SiCl4 MFC set to  0.000000
1/31/2011	12:31:46 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	12:31:46 PM	Tube furnace set to 0
1/31/2011	12:32:17 PM	Helium valve closed
1/31/2011	12:32:17 PM	H2 valve closed
1/31/2011	12:32:17 PM	BCl3 valve closed
1/31/2011	12:32:17 PM	PH3 valve closed
1/31/2011	12:32:17 PM	SiCl4 pre valve closed
1/31/2011	12:32:17 PM	SiCl4 post valve closed
1/31/2011	12:32:17 PM	Bubbler valve closed
1/31/2011	12:32:17 PM	Main Vac valve opened
1/31/2011	12:32:17 PM	Bypass valve opened
1/31/2011	12:32:17 PM	Helium MFC set to  0.000000
1/31/2011	12:32:17 PM	H2 MFC set to  0.000000
1/31/2011	12:32:17 PM	BCl3 MFC set to  0.000000
1/31/2011	12:32:17 PM	PHl3 MFC set to  0.000000
1/31/2011	12:32:17 PM	SiCl4 MFC set to  0.000000
1/31/2011	12:32:17 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	12:32:17 PM	Tube furnace set to 0
1/31/2011	12:32:17 PM	Run finished at 12:32 PM
1/31/2011	12:32:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	1:31:55 PM	Helium MFC set to  100.000000
1/31/2011	1:31:56 PM	Helium valve opened
1/31/2011	1:34:22 PM	Helium MFC set to  0.000000
1/31/2011	1:34:23 PM	Helium valve closed
1/31/2011	1:34:24 PM	Helium valve opened
1/31/2011	1:34:25 PM	Helium valve closed
1/31/2011	1:39:27 PM	Helium MFC set to  100.000000
1/31/2011	1:39:28 PM	Helium valve opened
1/31/2011	1:40:26 PM	Helium MFC set to  0.000000
1/31/2011	1:40:27 PM	Helium valve closed
1/31/2011	1:40:34 PM	Tube furnace set to 10
1/31/2011	1:40:37 PM	Tube furnace set to 100
1/31/2011	1:41:17 PM	Main Vac valve closed
1/31/2011	1:41:18 PM	Bypass valve closed
1/31/2011	1:41:26 PM	Bypass valve opened
1/31/2011	1:41:26 PM	Main Vac valve opened
1/31/2011	1:41:50 PM	Recipe started at 1:41 PM
1/31/2011	1:41:50 PM	Helium valve closed
1/31/2011	1:41:50 PM	BCl3 valve closed
1/31/2011	1:41:50 PM	PH3 valve closed
1/31/2011	1:41:50 PM	SiCl4 pre valve closed
1/31/2011	1:41:50 PM	SiCl4 post valve closed
1/31/2011	1:41:50 PM	Main Vac valve closed
1/31/2011	1:41:50 PM	Bypass valve closed
1/31/2011	1:41:50 PM	Bubbler valve closed
1/31/2011	1:41:50 PM	H2 valve opened
1/31/2011	1:41:50 PM	Helium MFC set to  0.000000
1/31/2011	1:41:50 PM	H2 MFC set to  500.000000
1/31/2011	1:41:50 PM	BCl3 MFC set to  0.000000
1/31/2011	1:41:50 PM	PHl3 MFC set to  0.000000
1/31/2011	1:41:50 PM	SiCl4 MFC set to  0.000000
1/31/2011	1:41:50 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	1:41:50 PM	Tube furnace set to 200
1/31/2011	1:43:08 PM	Helium valve closed
1/31/2011	1:43:08 PM	BCl3 valve closed
1/31/2011	1:43:08 PM	PH3 valve closed
1/31/2011	1:43:08 PM	SiCl4 pre valve closed
1/31/2011	1:43:08 PM	SiCl4 post valve closed
1/31/2011	1:43:08 PM	Main Vac valve closed
1/31/2011	1:43:08 PM	Bypass valve closed
1/31/2011	1:43:08 PM	H2 valve opened
1/31/2011	1:43:08 PM	Bubbler valve opened
1/31/2011	1:43:08 PM	Helium MFC set to  0.000000
1/31/2011	1:43:08 PM	H2 MFC set to  400.000000
1/31/2011	1:43:08 PM	BCl3 MFC set to  0.000000
1/31/2011	1:43:08 PM	PHl3 MFC set to  0.000000
1/31/2011	1:43:08 PM	SiCl4 MFC set to  0.000000
1/31/2011	1:43:08 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	1:43:08 PM	Tube furnace set to 1002
1/31/2011	1:59:08 PM	Helium valve closed
1/31/2011	1:59:08 PM	BCl3 valve closed
1/31/2011	1:59:08 PM	PH3 valve closed
1/31/2011	1:59:08 PM	SiCl4 pre valve closed
1/31/2011	1:59:08 PM	SiCl4 post valve closed
1/31/2011	1:59:08 PM	Main Vac valve closed
1/31/2011	1:59:08 PM	Bypass valve closed
1/31/2011	1:59:08 PM	H2 valve opened
1/31/2011	1:59:08 PM	Bubbler valve opened
1/31/2011	1:59:08 PM	Helium MFC set to  0.000000
1/31/2011	1:59:08 PM	H2 MFC set to  400.000000
1/31/2011	1:59:08 PM	BCl3 MFC set to  0.000000
1/31/2011	1:59:08 PM	PHl3 MFC set to  0.000000
1/31/2011	1:59:08 PM	SiCl4 MFC set to  0.000000
1/31/2011	1:59:08 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	1:59:08 PM	Tube furnace set to 1000
1/31/2011	2:04:08 PM	Helium valve closed
1/31/2011	2:04:08 PM	PH3 valve closed
1/31/2011	2:04:08 PM	Main Vac valve closed
1/31/2011	2:04:08 PM	Bypass valve closed
1/31/2011	2:04:08 PM	H2 valve opened
1/31/2011	2:04:08 PM	BCl3 valve opened
1/31/2011	2:04:08 PM	SiCl4 pre valve opened
1/31/2011	2:04:08 PM	SiCl4 post valve opened
1/31/2011	2:04:08 PM	Bubbler valve opened
1/31/2011	2:04:08 PM	Helium MFC set to  0.000000
1/31/2011	2:04:08 PM	H2 MFC set to  500.000000
1/31/2011	2:04:08 PM	BCl3 MFC set to  4.000000
1/31/2011	2:04:08 PM	PHl3 MFC set to  0.000000
1/31/2011	2:04:08 PM	SiCl4 MFC set to  50.000000
1/31/2011	2:04:08 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:04:08 PM	Tube furnace set to 1000
1/31/2011	2:22:08 PM	Helium valve closed
1/31/2011	2:22:08 PM	BCl3 valve closed
1/31/2011	2:22:08 PM	PH3 valve closed
1/31/2011	2:22:08 PM	SiCl4 pre valve closed
1/31/2011	2:22:08 PM	SiCl4 post valve closed
1/31/2011	2:22:08 PM	Main Vac valve closed
1/31/2011	2:22:08 PM	Bypass valve closed
1/31/2011	2:22:08 PM	H2 valve opened
1/31/2011	2:22:08 PM	Bubbler valve opened
1/31/2011	2:22:08 PM	Helium MFC set to  0.000000
1/31/2011	2:22:08 PM	H2 MFC set to  500.000000
1/31/2011	2:22:08 PM	BCl3 MFC set to  0.000000
1/31/2011	2:22:08 PM	PHl3 MFC set to  0.000000
1/31/2011	2:22:08 PM	SiCl4 MFC set to  0.000000
1/31/2011	2:22:08 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:22:09 PM	Tube furnace set to 0
1/31/2011	2:22:29 PM	H2 valve closed
1/31/2011	2:22:29 PM	BCl3 valve closed
1/31/2011	2:22:29 PM	PH3 valve closed
1/31/2011	2:22:29 PM	SiCl4 pre valve closed
1/31/2011	2:22:29 PM	SiCl4 post valve closed
1/31/2011	2:22:29 PM	Main Vac valve closed
1/31/2011	2:22:29 PM	Bypass valve closed
1/31/2011	2:22:29 PM	Helium valve opened
1/31/2011	2:22:29 PM	Bubbler valve opened
1/31/2011	2:22:29 PM	Helium MFC set to  400.000000
1/31/2011	2:22:29 PM	H2 MFC set to  0.000000
1/31/2011	2:22:29 PM	BCl3 MFC set to  0.000000
1/31/2011	2:22:29 PM	PHl3 MFC set to  0.000000
1/31/2011	2:22:29 PM	SiCl4 MFC set to  0.000000
1/31/2011	2:22:29 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:22:29 PM	Tube furnace set to 0
1/31/2011	2:42:29 PM	Helium valve closed
1/31/2011	2:42:29 PM	H2 valve closed
1/31/2011	2:42:29 PM	BCl3 valve closed
1/31/2011	2:42:29 PM	PH3 valve closed
1/31/2011	2:42:29 PM	SiCl4 pre valve closed
1/31/2011	2:42:29 PM	SiCl4 post valve closed
1/31/2011	2:42:29 PM	Main Vac valve closed
1/31/2011	2:42:29 PM	Bypass valve closed
1/31/2011	2:42:29 PM	Bubbler valve closed
1/31/2011	2:42:29 PM	Helium MFC set to  0.000000
1/31/2011	2:42:29 PM	H2 MFC set to  0.000000
1/31/2011	2:42:29 PM	BCl3 MFC set to  0.000000
1/31/2011	2:42:29 PM	PHl3 MFC set to  0.000000
1/31/2011	2:42:29 PM	SiCl4 MFC set to  0.000000
1/31/2011	2:42:29 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:42:29 PM	Tube furnace set to 0
1/31/2011	2:42:29 PM	Run finished at 2:42 PM
1/31/2011	2:59:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2011	2:59:29 PM	Recipe started at 2:59 PM
1/31/2011	2:59:29 PM	H2 valve closed
1/31/2011	2:59:29 PM	BCl3 valve closed
1/31/2011	2:59:29 PM	PH3 valve closed
1/31/2011	2:59:29 PM	SiCl4 pre valve closed
1/31/2011	2:59:29 PM	SiCl4 post valve closed
1/31/2011	2:59:29 PM	Main Vac valve closed
1/31/2011	2:59:29 PM	Bypass valve closed
1/31/2011	2:59:29 PM	Bubbler valve closed
1/31/2011	2:59:29 PM	Helium valve opened
1/31/2011	2:59:29 PM	Helium MFC set to  500.000000
1/31/2011	2:59:29 PM	H2 MFC set to  0.000000
1/31/2011	2:59:29 PM	BCl3 MFC set to  0.000000
1/31/2011	2:59:29 PM	PHl3 MFC set to  0.000000
1/31/2011	2:59:29 PM	SiCl4 MFC set to  0.000000
1/31/2011	2:59:29 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:59:30 PM	Tube furnace set to 0
1/31/2011	2:59:33 PM	Helium valve closed
1/31/2011	2:59:33 PM	H2 valve closed
1/31/2011	2:59:33 PM	BCl3 valve closed
1/31/2011	2:59:33 PM	PH3 valve closed
1/31/2011	2:59:33 PM	SiCl4 pre valve closed
1/31/2011	2:59:33 PM	SiCl4 post valve closed
1/31/2011	2:59:33 PM	Main Vac valve closed
1/31/2011	2:59:33 PM	Bypass valve closed
1/31/2011	2:59:33 PM	Bubbler valve closed
1/31/2011	2:59:33 PM	Helium MFC set to  0.000000
1/31/2011	2:59:33 PM	H2 MFC set to  0.000000
1/31/2011	2:59:33 PM	BCl3 MFC set to  0.000000
1/31/2011	2:59:33 PM	PHl3 MFC set to  0.000000
1/31/2011	2:59:33 PM	SiCl4 MFC set to  0.000000
1/31/2011	2:59:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	2:59:33 PM	Tube furnace set to 0
1/31/2011	2:59:33 PM	Run finished at 2:59 PM
1/31/2011	2:59:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2011	3:07:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	3:07:59 PM	Recipe started at 3:07 PM
1/31/2011	3:07:59 PM	Helium valve closed
1/31/2011	3:07:59 PM	H2 valve closed
1/31/2011	3:07:59 PM	BCl3 valve closed
1/31/2011	3:07:59 PM	PH3 valve closed
1/31/2011	3:07:59 PM	SiCl4 pre valve closed
1/31/2011	3:07:59 PM	SiCl4 post valve closed
1/31/2011	3:07:59 PM	Main Vac valve closed
1/31/2011	3:07:59 PM	Bubbler valve closed
1/31/2011	3:07:59 PM	Bypass valve opened
1/31/2011	3:07:59 PM	Helium MFC set to  0.000000
1/31/2011	3:07:59 PM	H2 MFC set to  0.000000
1/31/2011	3:07:59 PM	BCl3 MFC set to  0.000000
1/31/2011	3:07:59 PM	PHl3 MFC set to  0.000000
1/31/2011	3:07:59 PM	SiCl4 MFC set to  0.000000
1/31/2011	3:07:59 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	3:07:59 PM	Tube furnace set to 0
1/31/2011	3:08:32 PM	Helium valve closed
1/31/2011	3:08:32 PM	H2 valve closed
1/31/2011	3:08:32 PM	BCl3 valve closed
1/31/2011	3:08:32 PM	PH3 valve closed
1/31/2011	3:08:32 PM	SiCl4 pre valve closed
1/31/2011	3:08:32 PM	SiCl4 post valve closed
1/31/2011	3:08:32 PM	Bubbler valve closed
1/31/2011	3:08:32 PM	Main Vac valve opened
1/31/2011	3:08:32 PM	Bypass valve opened
1/31/2011	3:08:32 PM	Helium MFC set to  0.000000
1/31/2011	3:08:32 PM	H2 MFC set to  0.000000
1/31/2011	3:08:32 PM	BCl3 MFC set to  0.000000
1/31/2011	3:08:32 PM	PHl3 MFC set to  0.000000
1/31/2011	3:08:32 PM	SiCl4 MFC set to  0.000000
1/31/2011	3:08:32 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	3:08:32 PM	Tube furnace set to 0
1/31/2011	3:08:32 PM	Run finished at 3:08 PM
1/31/2011	3:08:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	3:11:50 PM	Helium MFC set to  100.000000
1/31/2011	3:11:51 PM	Helium valve opened
1/31/2011	3:12:51 PM	Helium MFC set to  0.000000
1/31/2011	3:12:52 PM	Helium valve closed
1/31/2011	3:19:24 PM	Helium MFC set to  100.000000
1/31/2011	3:19:26 PM	Helium valve opened
1/31/2011	3:19:26 PM	Helium valve closed
1/31/2011	3:19:26 PM	Helium valve opened
1/31/2011	3:21:07 PM	Helium MFC set to  0.000000
1/31/2011	3:21:08 PM	Helium valve closed
1/31/2011	3:22:24 PM	Helium MFC set to  60.000000
1/31/2011	3:22:25 PM	Helium valve opened
1/31/2011	3:28:33 PM	Helium MFC set to  0.000000
1/31/2011	3:28:34 PM	Helium valve closed
1/31/2011	3:29:41 PM	Helium MFC set to  100.000000
1/31/2011	3:29:42 PM	Helium valve opened
1/31/2011	3:29:42 PM	Helium valve closed
1/31/2011	3:29:42 PM	Helium valve opened
1/31/2011	3:45:18 PM	Helium MFC set to  0.000000
1/31/2011	3:45:21 PM	Helium MFC set to  0.000000
1/31/2011	3:45:22 PM	Helium valve closed
1/31/2011	3:46:07 PM	Main Vac valve closed
1/31/2011	3:46:09 PM	Bypass valve closed
1/31/2011	3:46:14 PM	Bypass valve opened
1/31/2011	3:46:14 PM	Main Vac valve opened
1/31/2011	3:46:54 PM	Recipe started at 3:46 PM
1/31/2011	3:46:54 PM	Helium valve closed
1/31/2011	3:46:54 PM	BCl3 valve closed
1/31/2011	3:46:54 PM	PH3 valve closed
1/31/2011	3:46:54 PM	SiCl4 pre valve closed
1/31/2011	3:46:54 PM	SiCl4 post valve closed
1/31/2011	3:46:54 PM	Main Vac valve closed
1/31/2011	3:46:54 PM	Bypass valve closed
1/31/2011	3:46:54 PM	Bubbler valve closed
1/31/2011	3:46:54 PM	H2 valve opened
1/31/2011	3:46:54 PM	Helium MFC set to  0.000000
1/31/2011	3:46:54 PM	H2 MFC set to  500.000000
1/31/2011	3:46:54 PM	BCl3 MFC set to  0.000000
1/31/2011	3:46:54 PM	PHl3 MFC set to  0.000000
1/31/2011	3:46:54 PM	SiCl4 MFC set to  0.000000
1/31/2011	3:46:54 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	3:46:54 PM	Tube furnace set to 200
1/31/2011	3:48:13 PM	Helium valve closed
1/31/2011	3:48:13 PM	BCl3 valve closed
1/31/2011	3:48:13 PM	PH3 valve closed
1/31/2011	3:48:13 PM	SiCl4 pre valve closed
1/31/2011	3:48:13 PM	SiCl4 post valve closed
1/31/2011	3:48:13 PM	Main Vac valve closed
1/31/2011	3:48:13 PM	Bypass valve closed
1/31/2011	3:48:13 PM	H2 valve opened
1/31/2011	3:48:13 PM	Bubbler valve opened
1/31/2011	3:48:13 PM	Helium MFC set to  0.000000
1/31/2011	3:48:13 PM	H2 MFC set to  400.000000
1/31/2011	3:48:13 PM	BCl3 MFC set to  0.000000
1/31/2011	3:48:13 PM	PHl3 MFC set to  0.000000
1/31/2011	3:48:13 PM	SiCl4 MFC set to  0.000000
1/31/2011	3:48:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	3:48:13 PM	Tube furnace set to 1002
1/31/2011	4:04:13 PM	Helium valve closed
1/31/2011	4:04:13 PM	BCl3 valve closed
1/31/2011	4:04:13 PM	PH3 valve closed
1/31/2011	4:04:13 PM	SiCl4 pre valve closed
1/31/2011	4:04:13 PM	SiCl4 post valve closed
1/31/2011	4:04:13 PM	Main Vac valve closed
1/31/2011	4:04:13 PM	Bypass valve closed
1/31/2011	4:04:13 PM	H2 valve opened
1/31/2011	4:04:13 PM	Bubbler valve opened
1/31/2011	4:04:13 PM	Helium MFC set to  0.000000
1/31/2011	4:04:13 PM	H2 MFC set to  400.000000
1/31/2011	4:04:13 PM	BCl3 MFC set to  0.000000
1/31/2011	4:04:13 PM	PHl3 MFC set to  0.000000
1/31/2011	4:04:13 PM	SiCl4 MFC set to  0.000000
1/31/2011	4:04:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	4:04:13 PM	Tube furnace set to 1000
1/31/2011	4:09:13 PM	Helium valve closed
1/31/2011	4:09:13 PM	PH3 valve closed
1/31/2011	4:09:13 PM	Main Vac valve closed
1/31/2011	4:09:13 PM	Bypass valve closed
1/31/2011	4:09:13 PM	H2 valve opened
1/31/2011	4:09:13 PM	BCl3 valve opened
1/31/2011	4:09:13 PM	SiCl4 pre valve opened
1/31/2011	4:09:13 PM	SiCl4 post valve opened
1/31/2011	4:09:13 PM	Bubbler valve opened
1/31/2011	4:09:13 PM	Helium MFC set to  0.000000
1/31/2011	4:09:13 PM	H2 MFC set to  400.000000
1/31/2011	4:09:13 PM	BCl3 MFC set to  3.200000
1/31/2011	4:09:13 PM	PHl3 MFC set to  0.000000
1/31/2011	4:09:13 PM	SiCl4 MFC set to  40.000000
1/31/2011	4:09:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	4:09:13 PM	Tube furnace set to 1000
1/31/2011	4:27:13 PM	Helium valve closed
1/31/2011	4:27:13 PM	BCl3 valve closed
1/31/2011	4:27:13 PM	PH3 valve closed
1/31/2011	4:27:13 PM	SiCl4 pre valve closed
1/31/2011	4:27:13 PM	SiCl4 post valve closed
1/31/2011	4:27:13 PM	Main Vac valve closed
1/31/2011	4:27:13 PM	Bypass valve closed
1/31/2011	4:27:13 PM	H2 valve opened
1/31/2011	4:27:13 PM	Bubbler valve opened
1/31/2011	4:27:13 PM	Helium MFC set to  0.000000
1/31/2011	4:27:13 PM	H2 MFC set to  500.000000
1/31/2011	4:27:13 PM	BCl3 MFC set to  0.000000
1/31/2011	4:27:13 PM	PHl3 MFC set to  0.000000
1/31/2011	4:27:13 PM	SiCl4 MFC set to  0.000000
1/31/2011	4:27:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	4:27:14 PM	Tube furnace set to 0
1/31/2011	4:27:34 PM	H2 valve closed
1/31/2011	4:27:34 PM	BCl3 valve closed
1/31/2011	4:27:34 PM	PH3 valve closed
1/31/2011	4:27:34 PM	SiCl4 pre valve closed
1/31/2011	4:27:34 PM	SiCl4 post valve closed
1/31/2011	4:27:34 PM	Main Vac valve closed
1/31/2011	4:27:34 PM	Bypass valve closed
1/31/2011	4:27:34 PM	Helium valve opened
1/31/2011	4:27:34 PM	Bubbler valve opened
1/31/2011	4:27:34 PM	Helium MFC set to  400.000000
1/31/2011	4:27:34 PM	H2 MFC set to  0.000000
1/31/2011	4:27:34 PM	BCl3 MFC set to  0.000000
1/31/2011	4:27:34 PM	PHl3 MFC set to  0.000000
1/31/2011	4:27:34 PM	SiCl4 MFC set to  0.000000
1/31/2011	4:27:34 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	4:27:34 PM	Tube furnace set to 0
1/31/2011	4:47:34 PM	Helium valve closed
1/31/2011	4:47:34 PM	H2 valve closed
1/31/2011	4:47:34 PM	BCl3 valve closed
1/31/2011	4:47:34 PM	PH3 valve closed
1/31/2011	4:47:34 PM	SiCl4 pre valve closed
1/31/2011	4:47:34 PM	SiCl4 post valve closed
1/31/2011	4:47:34 PM	Main Vac valve closed
1/31/2011	4:47:34 PM	Bypass valve closed
1/31/2011	4:47:34 PM	Bubbler valve closed
1/31/2011	4:47:34 PM	Helium MFC set to  0.000000
1/31/2011	4:47:34 PM	H2 MFC set to  0.000000
1/31/2011	4:47:34 PM	BCl3 MFC set to  0.000000
1/31/2011	4:47:34 PM	PHl3 MFC set to  0.000000
1/31/2011	4:47:34 PM	SiCl4 MFC set to  0.000000
1/31/2011	4:47:34 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	4:47:34 PM	Tube furnace set to 0
1/31/2011	4:47:34 PM	Run finished at 4:47 PM
1/31/2011	5:01:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2011	5:01:11 PM	Recipe started at 5:01 PM
1/31/2011	5:01:11 PM	H2 valve closed
1/31/2011	5:01:11 PM	BCl3 valve closed
1/31/2011	5:01:11 PM	PH3 valve closed
1/31/2011	5:01:11 PM	SiCl4 pre valve closed
1/31/2011	5:01:11 PM	SiCl4 post valve closed
1/31/2011	5:01:11 PM	Main Vac valve closed
1/31/2011	5:01:11 PM	Bypass valve closed
1/31/2011	5:01:11 PM	Bubbler valve closed
1/31/2011	5:01:11 PM	Helium valve opened
1/31/2011	5:01:11 PM	Helium MFC set to  500.000000
1/31/2011	5:01:11 PM	H2 MFC set to  0.000000
1/31/2011	5:01:11 PM	BCl3 MFC set to  0.000000
1/31/2011	5:01:11 PM	PHl3 MFC set to  0.000000
1/31/2011	5:01:11 PM	SiCl4 MFC set to  0.000000
1/31/2011	5:01:11 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	5:01:11 PM	Tube furnace set to 0
1/31/2011	5:01:14 PM	Helium valve closed
1/31/2011	5:01:14 PM	H2 valve closed
1/31/2011	5:01:14 PM	BCl3 valve closed
1/31/2011	5:01:14 PM	PH3 valve closed
1/31/2011	5:01:14 PM	SiCl4 pre valve closed
1/31/2011	5:01:14 PM	SiCl4 post valve closed
1/31/2011	5:01:14 PM	Main Vac valve closed
1/31/2011	5:01:14 PM	Bypass valve closed
1/31/2011	5:01:14 PM	Bubbler valve closed
1/31/2011	5:01:14 PM	Helium MFC set to  0.000000
1/31/2011	5:01:14 PM	H2 MFC set to  0.000000
1/31/2011	5:01:14 PM	BCl3 MFC set to  0.000000
1/31/2011	5:01:14 PM	PHl3 MFC set to  0.000000
1/31/2011	5:01:14 PM	SiCl4 MFC set to  0.000000
1/31/2011	5:01:14 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	5:01:14 PM	Tube furnace set to 0
1/31/2011	5:01:14 PM	Run finished at 5:01 PM
1/31/2011	5:01:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2011	5:05:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2011	5:05:06 PM	Recipe started at 5:05 PM
1/31/2011	5:05:06 PM	Helium valve closed
1/31/2011	5:05:06 PM	H2 valve closed
1/31/2011	5:05:06 PM	BCl3 valve closed
1/31/2011	5:05:06 PM	PH3 valve closed
1/31/2011	5:05:06 PM	SiCl4 pre valve closed
1/31/2011	5:05:06 PM	SiCl4 post valve closed
1/31/2011	5:05:06 PM	Main Vac valve closed
1/31/2011	5:05:06 PM	Bubbler valve closed
1/31/2011	5:05:06 PM	Bypass valve opened
1/31/2011	5:05:06 PM	Helium MFC set to  0.000000
1/31/2011	5:05:06 PM	H2 MFC set to  0.000000
1/31/2011	5:05:06 PM	BCl3 MFC set to  0.000000
1/31/2011	5:05:06 PM	PHl3 MFC set to  0.000000
1/31/2011	5:05:06 PM	SiCl4 MFC set to  0.000000
1/31/2011	5:05:06 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	5:05:06 PM	Tube furnace set to 0
1/31/2011	5:05:37 PM	Helium valve closed
1/31/2011	5:05:37 PM	H2 valve closed
1/31/2011	5:05:37 PM	BCl3 valve closed
1/31/2011	5:05:37 PM	PH3 valve closed
1/31/2011	5:05:37 PM	SiCl4 pre valve closed
1/31/2011	5:05:37 PM	SiCl4 post valve closed
1/31/2011	5:05:37 PM	Bubbler valve closed
1/31/2011	5:05:37 PM	Main Vac valve opened
1/31/2011	5:05:37 PM	Bypass valve opened
1/31/2011	5:05:37 PM	Helium MFC set to  0.000000
1/31/2011	5:05:37 PM	H2 MFC set to  0.000000
1/31/2011	5:05:37 PM	BCl3 MFC set to  0.000000
1/31/2011	5:05:37 PM	PHl3 MFC set to  0.000000
1/31/2011	5:05:37 PM	SiCl4 MFC set to  0.000000
1/31/2011	5:05:37 PM	Bypass solenoid MFC set to  0.000000
1/31/2011	5:05:38 PM	Tube furnace set to 0
1/31/2011	5:05:38 PM	Run finished at 5:05 PM
1/31/2011	5:05:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
